发明名称 |
Method For the Production of C-Plane Oriented Gan Substrates or AlxGa1-xN Substrates |
摘要 |
The invention relates to a method for producing c-plane GaN substrates or Al<SUB>x</SUB>Ga<SUB>1-x</SUB>N substrates using an original substrate. Said method is characterized by the following steps: a tetragonal (100)-oriented or (-100)-oriented original LiAlO<SUB>2 </SUB>substrate is used; said original substrate is nitrided in a nitrogen compound-containing atmosphere at temperatures lying below the decomposition temperature of LiAlO<SUB>2</SUB>; a nucleation layer is grown at temperatures ranging between 500° C. and 700° C. by adding GaCl or AlCl or a mixture of GaCl and AlCl in a nitrogen compound-containing atmosphere; single-crystalline c-plane-oriented GaN or Al<SUB>x</SUB>Ga<SUB>1-x</SUB>N is grown on the nucleation layer at temperatures ranging between 900° C. and 1050° C. by means of hydride vapor phase epitaxy (HVPE) with GaCl or AlCl or a GaCl/AlCl mixture in a nitrogen compound-containing atmosphere; and the substrate is cooled.
|
申请公布号 |
US2008171133(A1) |
申请公布日期 |
2008.07.17 |
申请号 |
US20060814331 |
申请日期 |
2006.01.18 |
申请人 |
FREIBERGER COMPOUND MATERIALS GMBH |
发明人 |
RICHTER EBERHARD;TRANKLE GUNTHER;WEYERS MARKUS |
分类号 |
B05D5/12;C30B31/00;C30B33/00 |
主分类号 |
B05D5/12 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|