Beam guidance system for the focusing guidance of radiation from a high-power laser light source toward a target and LPP X-ray source comprising a laser light source and such a beam guidance system

摘要

A beam guidance system serves for the focusing guidance of radiation from a high-power laser light source toward a target. The beam guidance system has at least one mirror as reflective beam guidance component and at least one transmission component which is at least partially transmissive to the radiation as refractive beam guidance component. The arrangement of the at least one mirror and of the at least one transmission component is such that beam-induced changes to the beam guidance properties of the at least one mirror are at least partly compensated for by beam-induced changes to the beam guidance properties of the at least one transmission component. This results in a beam guidance system in which beam-induced changes to the beam guidance properties of the beam guidance system do not have a disturbing effect on the focusing guidance of the radiation from the laser light source.

主权项

1. A system, comprising:
a mirror configured to reflect and guide radiation having a wavelength of between 9.5 μm and 11 μm toward a target; and a transmission component which is at least partially transmissive to the radiation, the transmission component being configured to refract and guide the radiation toward the target, wherein the mirror and the transmission component are configured so that, during use of the system, beam-induced changes to beam guidance properties of the mirror are at least partly compensated for by beam-induced changes to the beam guidance properties of the transmission component, and the transmission component has a compensation surface profile configured to at least partly compensate beam guidance aberrations produced by a component of the system.