SUBSTRATE TREATMENT BATH,申请号JP19960315278-传众专利搜索

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发明名称	SUBSTRATE TREATMENT BATH
摘要
申请公布号	JPH10163165(A)	申请公布日期	1998.06.19
申请号	JP19960315278	申请日期	1996.11.26
申请人	DAINIPPON SCREEN MFG CO LTD	发明人	SUHARA TADAHIRO;TANAKA MASATO
分类号	H01L21/306;H01L21/304;(IPC1-7):H01L21/306	主分类号	H01L21/306
代理机构		代理人
主权项
地址

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