A method for removing redeposited veils from etched platinum surfaces,申请号EP19980301614-传众专利搜索

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发明名称	A method for removing redeposited veils from etched platinum surfaces
摘要
申请公布号	EP0865079(A3)	申请公布日期	1999.10.20
申请号	EP19980301614	申请日期	1998.03.04
申请人	APPLIED MATERIALS, INC.	发明人	HWANG, JENG H.
分类号	H01L21/302;C23F4/00;H01L21/02;H01L21/3065;H01L21/3213;(IPC1-7):H01L21/321;H01L21/320;H01J37/32	主分类号	H01L21/302
代理机构		代理人
主权项
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