MICROLENS MANUFACTURING METHOD, MICROLENS, SPATIAL OPTICAL MODULATOR, SCREEN AND PROJECTOR

摘要

PROBLEM TO BE SOLVED: To provide a microlens manufacturing method by which a situation that a microlens having different shape from desired lens shape is formed is reduced, and a microlens having an excellent optical characteristic is manufactured, and the microlens manufactured by the manufacturing method and the like.

SOLUTION: The microlens manufacturing method includes: a recessed part forming process to form a recessed part 113 on a base plate 101; and a lens shape forming process to form the lens shape 114 on the base plate 101 by etching the base plate 101 on which the recessed part 113 is formed. The recessed part 113 formed in the recessed part forming process has shape which becomes smaller gradually toward a direction z being the depth direction of the recessed part 113.

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