| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic chuck member having no unevenness of attraction in the surface thereof, and to provide an electrostatic chuck apparatus using it. SOLUTION: This electrostatic chuck member comprises an insulating layer 1 consisting of an insulating material, a first electrode layer 2 having an electrode pattern provided on one surface of the insulating layer for generating a potential difference via the insulating layer, a second electrode layer provided on the other surface thereof, and insulating thin films 4 and 5 for covering the surfaces of these two electrode layers. The electrode pattern of the first electrode layer consists of a mesh-shaped electrode 21, the second electrode layer has an electrode pattern consisting of a plurality of island-shaped electrodes 31, and the mesh-shaped electrode 21 of the first electrode layer and the island-shaped electrodes 31 of the second electrode layer are so arranged that they do not overlap each other as seen from the direction perpendicular to the electrode layer surface. The electrostatic chuck apparatus is manufactured by sticking this electrostatic chuck member on a base so that the second electrode layer is located on the base side. COPYRIGHT: (C)2008,JPO&INPIT |
