发明名称 THICKNESS MEASUREMENT METHOD AND THICKNESS MEASUREMENT DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a thickness measurement method for a thickness measurement device with which calibration work for measurement errors is easy, and it is possible to reduce an error in the thickness measurement of a measurement object.SOLUTION: The thickness measurement method of an embodiment has the steps of: measuring, using a first range finder or a second range finder, a first distance that is the distance between the first range finder and the second range finder before a measurement object passes; measuring a second distance that is the distance between the first range finder when the measurement object passes and the surface of the measurement object facing the first range finder, and a third distance that is the distance between the second range finder and the surface of the measurement object facing the second range finder; measuring a fourth distance that is the distance between the first range finder after the measurement object passes and the second range finder; and correcting, on the basis of a difference between the first distance and the fourth distance, the thickness value of the measurement object found on the basis of the first distance or the fourth distance, the second distance, and the third distance.SELECTED DRAWING: Figure 1
申请公布号 JP2016133349(A) 申请公布日期 2016.07.25
申请号 JP20150006995 申请日期 2015.01.16
申请人 TOSHIBA CORP 发明人 UNNO TETSUO;AIZAWA KENJI
分类号 G01B11/06 主分类号 G01B11/06
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