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发明名称
摘要
申请公布号
JP2560993(B2)
申请公布日期
1996.12.04
申请号
JP19930221565
申请日期
1993.09.07
申请人
NIPPON ELECTRIC CO
发明人
OIKAWA YOICHI
分类号
H01L29/812;H01L21/285;H01L21/338;H01L29/423;H01L29/47;(IPC1-7):H01L21/338
主分类号
H01L29/812
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