METHOD OF PLANARIZING INTERLAYER INSULATING FILM USING SELECTION O3-TEOS OXIDE FILM,申请号KR19950017574-传众专利搜索

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发明名称	METHOD OF PLANARIZING INTERLAYER INSULATING FILM USING SELECTION O3-TEOS OXIDE FILM
摘要
申请公布号	KR0161192(B1)	申请公布日期	1999.02.01
申请号	KR19950017574	申请日期	1995.06.26
申请人	HYUNDAI ELECTRONICS IND. CO.,LTD	发明人	LEE, WOO-BOG;HONG, SANG-KI;OH, SE-JUN
分类号	H01L21/31;(IPC1-7):H01L21/31	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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