| 摘要 |
PROBLEM TO BE SOLVED: To provide an actuator having a structure with a plurality of drive parts for developing great thrust while suppressing the generation of rotating moment when stopping a moving member or a sliding member such as a table. SOLUTION: The actuator comprises a linear track having a rail and the moving member or the sliding member for moving along the rail, and the drive parts arranged almost parallel to the track for transmitting linear motion to the track part. Herein, the plurality of drive parts are provided and connection parts having the same number as that of the drive parts are arranged approximately perpendicular to the moving member or the sliding member of the track. The drive parts apply forces to the connection parts to linearly reciprocate the moving member or the sliding member on the rail. A stopping part is provided separately from the connection parts for stopping the movement of the moving member or the sliding member. COPYRIGHT: (C)2007,JPO&INPIT
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