| 摘要 |
PROBLEM TO BE SOLVED: To provide a conveyer capable of conveying quickly a tray from an IC loader part A to a heating chamber part B, capable of obtaining a simple conveying mechanism, and allowing smooth conveyance without being caught, and a conveying method therefor. SOLUTION: This conveyer provided with the first guide rail, and the second guide rail disposed orthogonally to the first guide rail, includes a tray conveying rotary arm for conveying the conveying tray from the IC loader part to the heating chamber part, while supporting the rotation center by a support base and pushing the conveying tray by an end part, and a guide block provided in a conveying passage in an intersection portion of the first and second guide rails, and going down along a vertical direction to evade the conveying tray, when passing the conveying tray from an IC unloader part to the IC loader part, and going up to guide the conveying tray, when passing the conveying tray from the IC loader part to the heating chamber part. COPYRIGHT: (C)2009,JPO&INPIT
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