发明名称 |
MANUFACTURING APPARATUS AND METHOD FOR ORGANIC LIGHT EMITTING DIODES |
摘要 |
The present invention relates to an apparatus and a method for manufacturing an organic light emitting diode. The apparatus for manufacturing an organic light emitting diode to manufacture an organic light emitting diode by using a large-sized substrate, may include a deposition chamber for depositing an organic thin film on a substrate; a first transfer module chamber for transferring a deposited substrate to the deposition chamber; a cutting chamber which cuts the substrate transferred from the first transfer module chamber into several pieces; and a sealing chamber for performing a sealing process on a cut substrate in the cutting chamber. So, the sealing process can be smoothly performed. |
申请公布号 |
KR20160109051(A) |
申请公布日期 |
2016.09.21 |
申请号 |
KR20150032702 |
申请日期 |
2015.03.09 |
申请人 |
SUNIC SYSTEM. LTD. |
发明人 |
LEE, YOUNG JONG;HWANG, IN HO |
分类号 |
H01L51/56;H01L21/3205;H01L21/677;H01L51/52 |
主分类号 |
H01L51/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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