发明名称 MANUFACTURING APPARATUS AND METHOD FOR ORGANIC LIGHT EMITTING DIODES
摘要 The present invention relates to an apparatus and a method for manufacturing an organic light emitting diode. The apparatus for manufacturing an organic light emitting diode to manufacture an organic light emitting diode by using a large-sized substrate, may include a deposition chamber for depositing an organic thin film on a substrate; a first transfer module chamber for transferring a deposited substrate to the deposition chamber; a cutting chamber which cuts the substrate transferred from the first transfer module chamber into several pieces; and a sealing chamber for performing a sealing process on a cut substrate in the cutting chamber. So, the sealing process can be smoothly performed.
申请公布号 KR20160109051(A) 申请公布日期 2016.09.21
申请号 KR20150032702 申请日期 2015.03.09
申请人 SUNIC SYSTEM. LTD. 发明人 LEE, YOUNG JONG;HWANG, IN HO
分类号 H01L51/56;H01L21/3205;H01L21/677;H01L51/52 主分类号 H01L51/56
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