发明名称 |
ETCHANT COMPOSITION AND METHOD FOR FABRICATING METAL PATTERN |
摘要 |
The present invention relates to an etchant composition which reduces the generation of environmentally toxic substances and a forming method of metal patterns using the same. The etchant composition comprises: 5 to 10 wt% of nitric acid; 0.5 to 5 wt% of a mercapto-based compound; 0.1 to 5 wt% of cyclic-type amine compound; and remaining water. |
申请公布号 |
KR20160109610(A) |
申请公布日期 |
2016.09.21 |
申请号 |
KR20150034362 |
申请日期 |
2015.03.12 |
申请人 |
DONGWOO FINE-CHEM CO., LTD. |
发明人 |
KIM, BO HYEONG;LEE, SEUNG SOO;LEE, JONG MUN |
分类号 |
C09K13/08;C23F1/30;H01L21/306 |
主分类号 |
C09K13/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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