发明名称 ETCHANT COMPOSITION AND METHOD FOR FABRICATING METAL PATTERN
摘要 The present invention relates to an etchant composition which reduces the generation of environmentally toxic substances and a forming method of metal patterns using the same. The etchant composition comprises: 5 to 10 wt% of nitric acid; 0.5 to 5 wt% of a mercapto-based compound; 0.1 to 5 wt% of cyclic-type amine compound; and remaining water.
申请公布号 KR20160109610(A) 申请公布日期 2016.09.21
申请号 KR20150034362 申请日期 2015.03.12
申请人 DONGWOO FINE-CHEM CO., LTD. 发明人 KIM, BO HYEONG;LEE, SEUNG SOO;LEE, JONG MUN
分类号 C09K13/08;C23F1/30;H01L21/306 主分类号 C09K13/08
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