发明名称 OBSERVING DEVICE
摘要 PURPOSE:To detect a spectrum of incident light with a relatively wide wavelength area with high precision in a short time with simple structure by splitting the incident light into plural branched beams of light and Fourier-transforming an interference waveform obtained by a photoelectric conversion means. CONSTITUTION:The incident light 1 is split into the branched beams of light 1a and 1b by a half mirror 2. The branched light 1a is again reflected by the half mirror 2 after passing through reflection mirrors 3 and 4 in order and made incident on the photoelectric conversion means 7. On the other hand, at the same time as this, the branched light 1b is again transmitted through the half mirror 2 after passing through reflection mirrors 4 and 3 in order and reaches the photoelectric means 7. As a result, an interference waveform by the branched beams of light 1a and 1b is image-formed on the photoelectric conversion means 7 and an intensity distribution of an electrical signal obtained according to the interference waveform is taken in a Fourier transformation part 8 and Fourier-transformed, by which the intensity distribution of the spectrum with the prescribed wavelength area of the incident light 1 is calculated and outputted to a display part 9.
申请公布号 JPS62249020(A) 申请公布日期 1987.10.30
申请号 JP19860092027 申请日期 1986.04.23
申请人 HITACHI LTD 发明人 OKABE TSUTOMU;ICHIKAWA KAZUYA;MATSUI SHIGERU
分类号 H01L21/302;G01J3/45;H01L21/3065 主分类号 H01L21/302
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