MOUNTING METHOD AND MOUNTING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a mounting method and a mounting apparatus which can effectively prevent a primary and secondary oxidations of metal bonds of works. SOLUTION: The mounting method of bonding a first work has a metal bonding part to a second work comprising a cleaning step of irradiating the metal bonding part of at least the first work with energy waves or energy particles, thereby cleaning them and a heating-bonding step of heating the metal bonding part of the cleaned first work in an inert gas atmosphere or a special gas atmosphere which does not react with at least the metal bonding part. This makes the first work be bonded to a bonding part of a second work.