| 摘要 |
PURPOSE:To obtain a flat dielectric ceramic substrate by holding a green compact between flat setters so that the front and rear sides of the compact come in contact with the setters and then firing the compact under a specified pressure. CONSTITUTION:Starting materials for a ceramic substrate such as ZrO2 and TiO2 are mixed with a sintering aid such as ZnO in a prescribed molar ratio, a proper amt. of water is added and they are mixed and dried by heating. The resultant dried mixture is pulverized, a binder such as PVA is added and they are granulated to form granules The water content of the granules is regulated and a platelike green compact is formed by press-compacting the granules. When a single dielectric ceramic substrate is produced, the green compact is held between two flat setters each made of ZrO2, etc so that the front and rear sides of the compact come in contact with the setters and the compact is fired under 1.1-26g/cm<2> pressure applied by the load of the setters at about 1,300-1,325 deg.C for about 5hr in an oxygen atmosphere to obtain the objective flat dielectric ceramic substrate free from warp and strain. When many dielectric ceramic substrates are produced, such setters and such green compacts are alternately piled up and the compacts are fired as mentioned above. |
