发明名称 |
Combustive destruction of halogenated compounds |
摘要 |
The disposal of troublesome substances, especially global-warming halogenated compounds is difficult enough, but is particularly difficult when associated with particulate-forming matter, such as silane and arsine commonly encountered in waste gas streams of the semiconductor industry. The combustive destruction of the troublesome substances in such a waste gas stream is simply and successfully achieved by injecting the stream admixed with fuel gas into a combustion zone surrounded by the radiant surface of a foraminous gas burner that is separately fed fuel gas and excess air sufficient to burn all the combustibles entering the combustion zone. A simple apparatus integrates the combustion zone with a quenching zone for the combustion product stream.
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申请公布号 |
US5510093(A) |
申请公布日期 |
1996.04.23 |
申请号 |
US19940280072 |
申请日期 |
1994.07.25 |
申请人 |
ALZETA CORPORATION |
发明人 |
BARTZ, DAVID;KENDALL, ROBERT M.;MORENO, FREDERICK E. |
分类号 |
B01D53/70;F23D14/16;F23G7/06;F23J15/06;(IPC1-7):F23D14/12;B01D53/64 |
主分类号 |
B01D53/70 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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