| 摘要 |
<p>PROBLEM TO BE SOLVED: To detect the presence/absence of an abnormality in data communication and to reduce the influence of the abnormality on a system device when the abnormality is detected. SOLUTION: An operation confirming message 51 is transmitted from a turbo molecular pump controller 20 to the system device 30 in a step 1. A reply message 53 to reception of the operation confirming message from the system device 30 is transmitted to the turbo molecular pump controller 20 in a step 3. Elapsed time from transmission time of the operation confirming message 51 to reception time of the reply message 53 is measured in a step 5 and when the elapsed time exceeds predetermined set time, warning, etc., of the abnormality in a communication system is performed in a step 6.</p> |
