| 摘要 |
PROBLEM TO BE SOLVED: To provide a low cost type ceramic member having high plasma resistance and excellent mechanical strength such a bending strength or high toughness, and a manufacturing method thereof. SOLUTION: The manufacturing method of the ceramic member has a process for preparing raw material powder obtained by adding to blend at least 0.01-1 wt.% magnesia and 0.1-15 wt.% solution containing yttrium expressed in terms of yttria into alumina particle having 0.1-1.0 μm average particle diameter, a process for molding the raw material powder and calcining the molding and a process for heating the calcined molding in an atmosphere containing gaseous hydrogen to generate yttrium aluminum garnet, depositing a film while infiltrating into the surface and sintering the molding at the same time. |
