摘要 |
PROBLEM TO BE SOLVED: To provide a highly sensitive vertical hole device without increasing a chip area.SOLUTION: In the vertical hole device, a trench inside of which is filled with an insulating film is provided between a voltage output terminal and a first current supply terminal. Thereby, by suppressing current flow-in to the voltage output terminal, a relative amount of a vertical current component is increased. Thus, it becomes possible to enhance the sensitivity.SELECTED DRAWING: Figure 1 |