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发明名称
METHOD FOR MEASURING PITCH
摘要
申请公布号
JPH02293614(A)
申请公布日期
1990.12.04
申请号
JP19890113756
申请日期
1989.05.08
申请人
HITACHI LTD
发明人
TOMITA HIDEO;SASA HARUO;SUZUKI KAZUYUKI;OIKAWA KENJI
分类号
G01B11/26;G01B21/16
主分类号
G01B11/26
代理机构
代理人
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地址
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