| 摘要 |
PURPOSE:To enable high-precise three-dimensional positioning over a wide range and to inhibit respective three-dimensional axes from interfering one another by providing mutually parallel elastic rods of four-rode constitution which are interposed between piezoelectric elements and a moving body and support the moving body flexibly. CONSTITUTION:The three-dimensional actuator 1 so constituted that the three piezoelectric elements 2 which are displaced along the respective X, Y, and Z axes support the moving body 4 flexibly through the four elastic rods 3. Then voltage is applied to, for example, the element 2 corresponding to the X axis and then the moving body 4 moves by a specific distance DELTAX in the X-axial direction. At this time, the elastic rod 3 interposed between the Z axis and moving body 4 operates as a parallel spring to inhibit the interference with other axes. Further, the moving body 4 is supported elastically and flexibly by the parallel four-rod constitution of the elastic rods 3, so the moving body 4 is inhibited from rotating on the movement displacement axis at the join position between the both. |
