SAMPLE PROCESSOR AND PROCESSING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a vacuum processing system and a vacuum processing method for reducing the number of used dummy samples while performance is maintained and for reducing cost. SOLUTION: A vacuum processor, a foreign matter detection device detecting the number of particles on the surface of the dummy sample, and an automatic transportation device which automatically transports the sample between the vacuum processor and the foreign mater detection device, are arranged. Then, a transportation control means stopping the carry-in of the dummy sample by the transportation device in the vacuum processor when the number of particles measured by the foreign matter detection device becomes smaller than a previously decided number is also disposed.