PHOTOSENSITIVE LAYER TRANSFER EQUIPMENT AND METHOD

摘要

PROBLEM TO BE SOLVED: To efficiently transfer photosensitive layers to glass substrates. SOLUTION: Laminate films 40 are thermocompression bonded to the glass substrates 22 by a thermocompression bonding roller pair 35. A cooling section 15 is arranged on the outlet side of the glass substrates 22 of the thermocompression bonding roller pair 35. Cold air is blown off toward the glass substrates 22 in the cooling section 15 and the glass substrates 22 are cooled. Base films 40b of the laminate films 40 are continuously peeled from the glass substrates 22 after cooling. The peeled base films 40b are taken up on a recovering shaft 56a. The glass substrates 22 are cooled in the cooling section 15 after thermocompression bonding and the base films 40b are continuously peeled from the glass substrates 22 and therefore the photosensitive layers 40a are efficiently transferred to the glass substrates 22. The need for cutting the laminate films 40 is eliminated. The generation of cutting dust is obviated and the occurrence of product defects resulting from the cutting dust is suppressed.