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经营范围
发明名称
CLEANING PROCESS FOR WAFER PROCESSING SOLUTION
摘要
申请公布号
JPH02292825(A)
申请公布日期
1990.12.04
申请号
JP19890113811
申请日期
1989.05.08
申请人
MATSUSHITA ELECTRON CORP
发明人
SHIRAISHI MASATOSHI
分类号
C02F1/28;H01L21/304
主分类号
C02F1/28
代理机构
代理人
主权项
地址
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