| 摘要 |
PROBLEM TO BE SOLVED: To enhance the operation rate of an external cassette transportation means (AGV) by promoting parallel processing of cassettes on a cassette stage for improved through put. SOLUTION: A cassette stage 20 is constituted of two stages for allowing vertical movement. The stage 20 is moved upwards to bring a lower-stage cassette stage 21 to an accessable position from an external cassette transportation means 34, while an upper-stage cassette stage 22 brought to an accessable position of for a cassette loader 8. While cassettes 3 and 4 are fed to the lower- stage cassette stage 21, processed cassettes 1 and 2 are taken out to the stage 22. The stage 20 is moved downwards to make the stage 21 approach where the fed cassettes 3 and 4 are placed an orientation-flat alignment device 13, while the processed cassettes 1 and 2 on the stage 22 brought to an access- possible position for the external cassette transportation means 34. During the orientation-flat alignment with the fed cassettes 3 and 4, the processed cassettes 1 and 2 are driven away. |
