| 摘要 |
PROBLEM TO BE SOLVED: To provide a non-contact supporting device adaptable to changes in the flotation of a highly accurate flotation part. SOLUTION: A detecting block 36 including a laser displacement meter for detecting a flotation amount in non-contact is provided on a flotation suction mixture part 5 for seizing an actual flotation amount. It is used to contribute to improve working accuracy and actualizing highly accurate floatation, resulting in adaptability to changes in environment therearound and in the shape, size and weight of a work G. COPYRIGHT: (C)2007,JPO&INPIT |
