METHOD AND APPARATUS FOR CONTROLLING STAGE, METHOD AND APPARATUS FOR EXPOSURE, AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To accurately keep control of a surface position and a posture of a substrate.

SOLUTION: A stage WTB driven in a first direction by a first drive signal and driven in a second direction intersecting with the first direction by a second drive signal is controlled. A correction step for correcting the first drive signal based on the second drive signal is provided.

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