发明名称 DUENNSCHICHTKOMBINATION UND VERFAHREN ZU IHRER HERSTELLUNG
摘要 In the manufacture of devices using a metal film deposited on a substrate of paper or synthetic resin sheet or strip material, an advantage has been found with respect to promoting adherence and resisting corrosion, when an intermediate layer is used that does not completely cover the substrate but leaves gaps between covered areas or islands. The top layer, which covers the exposed areas of the substrate and the intermediate layer, is aluminum, zinc, cadmium or zinc-cadmium. The patchy intermediate layer is an oxide or a mixture of oxides of tungsten, lead, antimony, bismuth. Oxides of certain other metals and silicon and boron oxides are also usable. Both the oxide layer and the metal layer can be vapor-deposited on a moving strip of the substrate at a foreign gas pressure of up to 1 torr. in a single pass of the substrate strip through the vacuum chamber. The oxide can be thermally deposited by vaporizing the oxide in question in vacuum or it can be formed by the action of residual oxygen or water vapor on the corresponding atoms of pure metals vaporized in the vacuum for deposition.
申请公布号 DE2641232(A1) 申请公布日期 1978.03.16
申请号 DE19762641232 申请日期 1976.09.14
申请人 ROBERT BOSCH GMBH 发明人 FOERSTER,HERBERT,DIPL.-PHYS.;BAYER,DIETER
分类号 H01G4/08;H01L27/01;(IPC1-7):H01G1/015;H01G4/20;C23C13/02 主分类号 H01G4/08
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