| 摘要 |
<p>An object of the present invention is to provide a back reflector layer in a texture structure with a high reflectivity by preventing oxidation of a ground metal or alloy, and a method for forming it. A further object is to provide a photovoltaic element excellent in characteristics such as a conversion efficiency, and a process for fabricating it. The back reflector layer has a metal or alloy (hereinafter referred to as a first metal), and a transparent oxide of a second metal, formed on the first metal. A photovoltaic element is formed by forming a semiconductor junction on the back reflector layer. In the back reflector layer and the photovoltaic element, an electron affinity of the second metal is 0.46 or more eV smaller than that of the first metal, and the transparent oxide is formed by a sputtering method in an atmosphere comprising at least H2O and an inert gas and with a target having a composition ratio of the second metal being 1.06 to 1.2 times a stoichiometric composition thereof. <MATH></p> |
