| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of treating a base material with a normal pressure plasma which can treat the large-area base material, can treat the base material uniformly and at high speed, and, moreover, does not exert damage on the base material. SOLUTION: In a method of treating a base material to be treated with a discharge plasma, a solid dielectric is installed on the opposing surface of an electrode on at least one side of electrodes opposing to each other under a pressure in the vicinity of atmospheric pressure, process gas is introduced between the electrodes, and the discharge plasma obtainable by applying a pulse-shaped electric field to the process gas is induced to the base material to be treated arranged outside a discharge space to bring the discharge plasma into contact with the base material to be treated. By adopting this method, the large-area base material can be easily treated, and, moreover, it becomes possible to lighten an electrical and thermal burden to the base material to be treated during the treatment. |
