发明名称 |
Apparatus for obtaining planarity measurements with respect to a probe card analysis system |
摘要 |
A system and method of mitigating the effects of component deflections in a probe card analyzer system may implement three-dimensional comparative optical metrology techniques to model deflection characteristics. An exemplary system and method combine non-bussed electrical planarity measurements with fast optical planarity measurements to produce "effectively loaded" planarity measurements.
|
申请公布号 |
US7579853(B2) |
申请公布日期 |
2009.08.25 |
申请号 |
US20080136693 |
申请日期 |
2008.06.10 |
申请人 |
RUDOLPH TECHNOLOGIES, INC. |
发明人 |
STROM JOHN T |
分类号 |
G01R31/02;G01R3/00;G01R31/28 |
主分类号 |
G01R31/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|