发明名称 POSITIVE-WORKING PHOTORESISTS EMPLOYING A SELECTED MIXTURE OF ETHYL LACTATE AND ETHYL 3-ETHOXY PROPIONATE AS CASTING SOLVENT
摘要 <p>A light-sensitive composition characterized by an admixture of: (a) at least one alkali-soluble binder resin; (b) at least one photoactive compound; (c) a sufficient amount of a solvent mixture characterized by ethyl lactate and ethyl 3-ethoxy propionate to dissolve (a) and (b); characterized in that the amount of said binder resin is from about 60 % to 95 % by weight, the amount of said photoactive compound is from about 5 % to about 40 % by weight, both based on the total solids content of said light-sensitive composition, and characterized in that the weight ratio of ethyl lactate to ethyl 3-ethoxy propionate is from about 30:70 to 80:20.</p>
申请公布号 WO1990005325(A1) 申请公布日期 1990.05.17
申请号 US1989005035 申请日期 1989.11.08
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