METHOD FOR TITANIUM NITRIDE COATING DEPOSITION FROM GAS PHASE ON HARD ALLOY TOOLS

摘要

This method is used in metalworking. It ensures a uniform coating on the solid-alloy instruments by producing smooth and homogeneous (in composition and structure) coatings. It consists of a reaction between the start components of hydrogen, nitrogen and titanium chloride, which is carried out at temperatures between 950 and 1030 degrees C, and pressures between 20 and 40 millitons, while the temperature gradient in the reactor zone - following the direction of movement of the reaction gases - is positive and is up to 0.5 degrees C/cm, and temperature amplitude at the entry and exit of the gas of up to 40 degrees C. The gaseous mixture contains chlorine hydrogen between 1 and 3 % vol.