Piezoresistance paste and mechanical sensor using the same

摘要

The present invention provides a mechanical sensor high in sensitivity (GF) and reliability. The mechanical sensor comprises an insulating substrate, a pair of electrodes formed on the insulating substrate, and a piezoresistance element formed by connecting the electrodes. The piezoresistance element is substantially made of a glass of the PbO-SiO2-B2-O3-Al2O3 system comprising 73.1 to 86.7 wt % of PbO, 9.7 to 22.2 wt % of SiO2, 2.5 to 5.0 wt % of B2O3 and 0.9 to 3.6 wt % of Al2O3 and a ruthenium oxide powder dispersed in the glass. The piezoresistance element is formed by coating and baking a paste containing the ruthenium oxide powder, a powder of the glass and an organic binder.