| 摘要 |
PROBLEM TO BE SOLVED: To suppress as far as possible temperature-caused fluctuations in detection sensitivity due to air damping, when a vibration-type angular velocity sensor is put into operation in the air. SOLUTION: While a first movable part 31 as a vibrator is driven to vibrate in x-direction, it generates a detection vibration in the y-direction when an angular velocity Ω is imposed thereon, and the angular velocity is detected, based on changes in capacitances between comb-tooth parts 36 of the movable part 31 and detection electrodes 50 caused by the detection vibration. Assuming that a resonance frequency in a driven vibration mode is fd and a resonance frequency in a detection vibration mode is fs, a relation is defined between a detuning degree α and a Q-factor Qs of the detection vibration mode, where the detuning degree α is the ratio fd/fs between the two resonance frequencies. |
