| 摘要 |
PURPOSE:To improve a cleaning effect by a method wherein a material to be cleaned is irradiated using simultaneously or alternately UV lamps and infrared lamps. CONSTITUTION:A cleaning device is provided with infrared lamps for beating the surface of a substrate along with UV lamps for generating ozone and an oxidative destruction reaction using the ozone is made to perform simultaneously with the heating. A continuous production and destruction of ozone are caused by low-pressure mercury-arc lamps 5, which have both of waveforms of 1849Angstrom and 2537Angstrom in plenty and consist of molten quartz, in a reaction chamber 2. In particular, an intermediate product which is generated in the process of the production and destruction of ozone is atomic oxygen and this acts as a strong oxidizer. The temperature of the substrate is kept it about 80 degrees by halogen lamps 4 and a cleaning time can be shortened. Thereby, a cleaning effect can be improved. |
