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发明名称
VORRICHTUNG ZUR GASABFUHR.
摘要
申请公布号
DE3780747(D1)
申请公布日期
1992.09.03
申请号
DE19873780747
申请日期
1987.08.19
申请人
SILICON VALLEY GROUP, INC., SAN JOSE, CALIF., US
发明人
TAYLOR, SR., JERRY A., CORONA CALIFORNIA 91720, US
分类号
B01J4/00;C23C16/44;C23C16/56;H01L21/22;(IPC1-7):H01L21/00;C23C16/54
主分类号
B01J4/00
代理机构
代理人
主权项
地址
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