| 摘要 |
PROBLEM TO BE SOLVED: To enhance the reliability of connection between a sensor beam and an electrode by a structure wherein the electrode on one side of a sensor beam is extended to the end face and connected with an outer electrode formed thereon, while the electrode on the other side is terminated in front of the end face and connected with the outer electrode through circuit wiring extending from the terminal position. SOLUTION: A sensor beam 10 comprises a piezoelectric 30, and a metal plate 50 applied thereto and has a plane, on the piezoelectric 30 side, printed with an electrode 40 of conductive ink. The sensor beam 10 is arranged to constitute a cantilever beam which flexes upon application of a vibration to generate an electric signal. The electric signal is detected through the electrode 40 and a metal plate 50 thus sensing the vibration. The metal plate 50 is connected with an outer electrode 100a formed on the outer side face at the fixed edge 11 on the fixed end side of sensor beam 10 as well as an outer electrode 101a. The electrode 40 terminates in front of the edge 11 and connected with an outer electrode 100b through a circuit wiring 70 formed in a housing 20. Furthermore, the outer electrode 100b is connected with the outer electrode 101b. |
