| 摘要 |
PURPOSE: An accelerometer is provided to realize an accelerometer which is capable of detection of acceleration along two axes, and which is compact yet simple to manufacture. Furthermore, to realize an accelerometer which has minimal cross-axis sensitivity. CONSTITUTION: As shown figure 1, an accelerometer according to the present invention is capable of measuring acceleration/deceleration along two axes, X,Z as shown. The accelerometer comprises an outer housing which forms a mass support frame(1). Attached to the frame(1) and a pair of outer spring members(2,3), which are aligned along an axis perpendicular to the first measuring axis X. The outer spring members(2,3) support a mass(4) which comprises an outer mass(5) and an inner mass(6). The inner mass(6) is supported on the outer mass(5) by two pairs of inner spring members(7,8,9,10). Both pairs of inner spring members(7,8,9,10) are perpendicular to one another, in a plane which also includes the axis along which the outer spring members(2,3) are aligned, and at an angle substantially 45 DEG thereto. The accelerometer is etched from a crystalline semiconductor material, in this example silicon, such that a crystalline axis is parallel to the axis of alignment of one of the pairs of inner spring members(7,8) or(9,10). |
