| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a forming method and an apparatus for an electrode thin film used in a thin-film solar battery for enhancing adhesive force of a thin-film electrode layer and improving the reliability, by making it possible to increase the substrate temperature to an adequate desirable temperature during film formation of a first electrode layer and a third electrode layer. SOLUTION: At a front stage of a film formation region where a tabular heater 9 and a spatter electrode 8 are opposite to each other, a second heater 17 for pre-heating a film substrate is provided on a forming side of an electrode thin film of the film substrate. Part of the second heater 17 is located opposite to part of the tabular heater 9. The film substrate 5 is pre-heated by the second heater 17, pre-heated again at a duplicated part of the tabular heater 9 and the second heater 17, and after that an electrode thin film is formed by spattering while the substrate 5 is heated with the tabular heater 9.</p> |
