发明名称 Method of applying cladding material on conductive lines of MRAM devices
摘要 A method of fabricating a cladding region for use in MRAM devices includes the formation of a conductive bit line proximate to a magnetoresistive memory device. The conductive bit line is immersed in a first bath containing dissolved ions of a first conductive material for a time sufficient to displacement plate a first barrier layer on the conductive line. The first barrier layer is then immersed in an electroless plating bath to form a flux concentrating layer on the first barrier layer. The flux concentrating layer is immersed in a second bath containing dissolved ions of a second conductive material for a time sufficient to displacement plate a second barrier layer on the flux concentrating layer.
申请公布号 US7402529(B2) 申请公布日期 2008.07.22
申请号 US20050139143 申请日期 2005.05.26
申请人 FREESCALE SEMICONDUCTOR, INC. 发明人 MOLLA JAYNAL A.;D'URSO JOHN;KYLER KELLY;ENGEL BRADLEY N.;GRYNKEWICH GREGORY W.;RIZZO NICHOLAS D.
分类号 H01L21/302;H01L27/105;C25D5/12;G11C11/15;G11C11/16;H01L21/00;H01L21/4763;H01L21/8246;H01L27/22 主分类号 H01L21/302
代理机构 代理人
主权项
地址