METHOD FOR PRODUCING A SOLAR CELL HAVING A TWO-STAGE DOPING

摘要

Method for producing solar cells with a two-stage doping (9, 11) comprising the method steps of heavy doping (50) of at Ieast a part of the solar cell substrate (1), of at least temporarily protecting doped areas (8), in which heavily doped areas (9) of the two-stage doping (9, 11) should be formed, from an etching medium and etching back (54; 62, 64; 72, 74) unprotected doped areas (17) of the solar cell substrate (1) by means of the etching medium, whereby, for the purpose of protecting the doped areas, sacrificial structures (7) are ap¬ plied (52) on the areas (8) to be protected, which are at Ieast partly etched (54; 62, 64; 72, 74) during etching back (54; 62, 64; 72, 74) of the unprotected doped areas.