SUBSTRATE-PROCESSING METHOD, COMPUTER STORAGE MEDIUM, AND SUBSTRATE-PROCESSING SYSTEM

摘要

A substrate-processing method using a block copolymer that includes a hydrophilic polymer (411) and a hydrophobic polymer (412) has a polymer separation step; the proportion of the molecular weight of the hydrophilic polymer in the block copolymer is adjusted to 20-40% so that the hydrophilic polymer (411) is arranged in positions that correspond to a hexagonal close-packed structure in plan view after the polymer separation step; and pillar-shaped first hydrophilic polymers (411a) on a circular pattern (404) based on a hydrophobic coating film are separated in phase from each other during the polymer separation step, pillar-shaped second hydrophilic polymers (411b) are separated in phase between the first hydrophilic polymers (411a), and the diameter of the circular pattern (404) is determined such that the first hydrophilic polymers (411a) and the second hydrophilic polymers (411b) are arranged in positions that correspond to a hexagonal close-packed structure in plan view.