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发明名称
SEMICONDUCTOR DEVICE AND MANUFACTURE OF THE SAME
摘要
申请公布号
JPH0411750(A)
申请公布日期
1992.01.16
申请号
JP19900114775
申请日期
1990.04.28
申请人
MITSUBISHI ELECTRIC CORP
发明人
HAYAFUJI AKIO
分类号
H01L21/302;H01L21/20;H01L21/3065;H01L21/76;H01L21/764
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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