| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a manufacturing method of a superthin plate-like piezoelectric vibrator which can be miniaturized, by solving the problem regarding a manufacturing method of a piezoelectric vibrator, such as conventional superthin plate quartz vibrator where miniaturization cannot be realized, because crystal face in a thick-wall part around a vibration part is deposited by etching. SOLUTION: The manufacturing method of a piezoelectric vibrator consists of a process for forming a plurality of thin-wall parts, having a prescribed thickness by recessing a plurality of portions of the main surface of a piezoelectric substrate, a process for measuring thickness of the thin-wall parts, a process for finely adjusting the thickness of the thin-wall parts turning into an adjusting object, based on the thickness measurement result, a process for forming an electrode at a prescribed position of the piezoelectric substrate, and a process for cutting a peripheral part of each of the thin-wall parts or the vicinity of the peripheral part by using a laser light.</p> |
