| 发明名称 |
MEMS VALVE |
| 摘要 |
A valve (100) where the valve membrane is made from silicone rubber (118). Preferably the valve is a microelectromechanical systems (MEMS) thermopneumatic valve. Because of the advantageous physical properties of silicone rubber, the valve provides desirable performance with reasonable power consumption.
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| 申请公布号 |
WO9832616(A1) |
申请公布日期 |
1998.07.30 |
| 申请号 |
WO1998US01529 |
申请日期 |
1998.01.23 |
| 申请人 |
CALIFORNIA INSTITUTE OF TECHNOLOGY |
发明人 |
TAI, YU-CHONG;XING, YANG;GROSJEAN, CHARLES |
| 分类号 |
B81B3/00;F15C5/00;F16K99/00;(IPC1-7):B44C1/22;F16K31/12 |
主分类号 |
B81B3/00 |
| 代理机构 |
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代理人 |
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