发明名称 METHOD AND APPARATUS FOR MEASURING POSITIONING ERROR USING INDEX MARK, AND MACHINING APPARATUS THAT CORRECTS ERROR BASED ON MEASURED RESULT
摘要 <p>Index marks (21-24) is fixed with predetermined accuracy with respect to image information detector means (1, 2). When image detector means (1) having a narrow field of vision can detect the index marks (21-24), the image information is used to determine the position error of a workpiece (7). When the image detector means (1) is not able to detect the index marks (21-24), image detector means (2) having a wide field of vision detects the index marks (21-24), and the image information is used to determine the position error of a workpiece (7), which in turn is used to correct the relative position between the image detector means (2) and the workpiece (7). The image detector means (1) having a narrow field of vision then seeks image information about the index marks (21-24) to determine the position error of the workpiece (7).</p>
申请公布号 WO2000037884(P1) 申请公布日期 2000.06.29
申请号 JP1998005793 申请日期 1998.12.22
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