HARD FILM FOR CUTTING TOOLS, CUTTING TOOL COATED WITH HARD FILM, PROCESS FOR FORMING HARD FILM, AND TARGET USED TO FORM HARD FILM

摘要

A hard film for cutting tools which is composed of (Ti1-a-b-c-d, A1a, Cr b, Si c, B a)(C1-aN e) 0.5 .ltoreq. a .ltoreq. 0.8, 0.06 .ltoreq. b, 0 .ltoreq. c .ltoreq. 0.1, 0 .ltoreq. d .ltoreq. 0.1, 0 .ltoreq. c+d .ltoreq. 0.1, a+b+c+d < 1, 0.5 .ltoreq. e .ltoreq. 1 (where a, b, c, and d denote respectively the atomic ratios of Al, Cr, Si, and B, and a denotes the atomic ratio of N.)