| 摘要 |
PROBLEM TO BE SOLVED: To provide a corrosion resistant member that has excellent corrosion resistance against a halogen-based corrosive gas such as fluorine gas, chlorine gas and the like and plasma thereof, and when used as a mounting plate of an electrostatic device, has excellent adsorption of a tabular sample of a semiconductor wafer or the like, to provide a method for producing the corrosion resistant member and to provide an electrostatic chuck device having the corrosive resistant member.SOLUTION: The corrosion resistant member 17 includes a complex oxide produced by substituting a part of samarium in samarium aluminum perovskite with a rare earth element (RE) other than samarium and REAlOand is composed of a sintered body represented by formula (1): SmREAlO(x+y=1, x>0, y>0; preferably, 0.5≤x<1, 0<y≤0.5). The method for producing the corrosion resistant member 17 comprises: mixing each of powders of SmO, AlOand REOin the presence of a dispersant and dispersing the same in a dispersion medium to prepare a slurry; removing the dispersion medium and granulating; and sintering.SELECTED DRAWING: Figure 1 |
